Micro- and nanoelectromechanical systems with self-propagating switching of devices - structures with phase changes metal-semiconductor analog

The possibilities of micro- and nanoelectromechanical systems analogs of structures with PCMS have been researchers, theoretically. The offered structure is considered, in which the series switching of devices from one state in another is implemented and the self-distribution of the switched state along structure and its transition to a new state (principle of a domino) is carried out. On the base of the solution of differential equations linking cantilever bias (sag) to its design parameters and an affixed voltage it was established, that in meshes with d>100-150 nm to the defining speaker of meshes and processes of failure (the switching) are forces of Coulomb and elasticity, the Casimir force become essential at d<100 nm, and Van-der-Vaals force at d<10 nm. If the exterior voltage is absent it is possible to establish the oscillations in the mesh by Casimir and elasticity forces which energy is ensured with energy of vacuum, and velocity of change of amplitude is ensured with parameters of a mesh and frictional force. The potential difference at a level 0.1 mV can cause switching of system from high-resistance unlocked in the conductive locked state. The implemented design parameters of a mesh at d 10-1000 nm allow to create controllable mediums, which on fundamental parameters are comparable or considerably exceed mediums on a PCMS in VO/sub 2/ basis.