Temperature Sensor Design in a High Volume Manufacturing 65nm CMOS Digital Process

Author

Duarte, David E. ; Geannopoulos, George ; Mughal, Usman ; Wong, Keng L. ; Taylor, Greg

Author_Institution

Intel Corp., Hillsboro

fYear

2007

fDate

16-19 Sept. 2007

Firstpage

221

Lastpage

224

Abstract

Thermal management (TM) allows the system architect to design a cooling solution based on real-life power consumption, not peak power. The on-die thermal sensor circuit, as the core of the TM system, monitors the on-die junction temperature (Tj). We present a novel high-linearity thermal sensor topology with built-in circuit support for correction of systematic shifts in the transfer function correction. Results obtained on the 65 nm Pentiumreg4 processor demonstrate the feasibility and effectiveness of the design.

Keywords

CMOS integrated circuits; microprocessor chips; temperature sensors; thermal management (packaging); transfer functions; CMOS digital process; high-linearity thermal sensor topology; on-die junction temperature; on-die thermal sensor circuit; size 65 nm; temperature sensor design; thermal management; transfer function correction; CMOS process; Circuits; Cooling; Energy management; Manufacturing processes; Power system management; Sensor systems; Temperature sensors; Thermal management; Thermal sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Custom Integrated Circuits Conference, 2007. CICC '07. IEEE

Conference_Location

San Jose, CA

Print_ISBN

978-1-4244-1623-3

Electronic_ISBN

978-1-4244-1623-3

Type

conf

DOI

10.1109/CICC.2007.4405718

Filename

4405718