Title :
III–V-IV integration toward electronics and photonics convergence on a silicon platform
Author :
Kei May Lau ; Qiang Li
Author_Institution :
Dept. of Electron. & Comput. Eng., Hong Kong Univ. of Sci. & Technol., Kowloon, China
Abstract :
Integration of III-V compound semiconductor devices on a Si manufacturing platform represents one of the most topical challenges today. Potentially, such heterogeneous integration can offer numerous opportunities in combining the unique electronic and photonic functionalities of III-V technology with the large volume, low cost and high density Si CMOS technology. Here we review the major challenges and our recent progress in monolithic integration of III-V materials on Si by direct epitaxy and its device applications. Several importance techniques to achieve high crystalline quality III-V semiconductors on Si are presented and their distinct advantages and limitations are discussed.
Keywords :
CMOS integrated circuits; III-V semiconductors; elemental semiconductors; epitaxial growth; integrated optoelectronics; silicon; III-V compound semiconductor device; III-V-IV integration; Si; direct epitaxy; electronic functionality; heterogeneous integration; high density CMOS technology; monolithic integration; photonic functionality; silicon manufacturing platform; Abstracts; Annealing; Gallium arsenide; Indium phosphide; Silicon; Substrates;
Conference_Titel :
Solid-State and Integrated Circuit Technology (ICSICT), 2014 12th IEEE International Conference on
Conference_Location :
Guilin
Print_ISBN :
978-1-4799-3296-2
DOI :
10.1109/ICSICT.2014.7021190