Title :
A 37 ppm/°C Temperature Compensated CMOS ASIC with ±16 V Supply Protection for Capacitive Microaccelerometers
Author :
Ko, Hyoungho ; Lee, Ahra ; Ahn, Taedong ; Paik, Seung-Joon ; Choi, Byoungdoo ; Cho, Dong-il Dan
Author_Institution :
Seoul Nat. Univ., Seoul
Abstract :
A high reliability CMOS-MEMS hybrid microaccelerometer system is presented. To enhance the temperature response and to minimize die-to-die variations, a low-noise continuous time front-end architecture with temperature compensation and parasitic cancellation is proposed. The temperature coefficients of the output bias and the scale factor are measured to be 37 ppm/degC and 27 ppm/degC, respectively. The bias instability level of the system is measured to be 42 mug. The integrated +16 V power supply protection block gives the enhanced system reliability and reduced form-factor.
Keywords :
CMOS integrated circuits; accelerometers; application specific integrated circuits; capacitive sensors; microsensors; ASIC; CMOS-MEMS hybrid microaccelerometer system; capacitive microaccelerometers; power supply protection block; voltage 16 V; Application specific integrated circuits; Capacitors; Dynamic range; Electrodes; Frequency; Integrated circuit measurements; Integrated circuit reliability; Power system protection; Power system reliability; Temperature sensors;
Conference_Titel :
Custom Integrated Circuits Conference, 2007. CICC '07. IEEE
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-4244-1623-3
Electronic_ISBN :
978-1-4244-1623-3
DOI :
10.1109/CICC.2007.4405802
