DocumentCode :
2416515
Title :
Surface Mobility on Silicon from Acoustoelectric Current Measurements
Author :
Cafarella, J.H. ; Bers, A. ; Burke, B.E.
fYear :
1972
fDate :
1972
Firstpage :
181
Lastpage :
185
Keywords :
Conductivity; Current measurement; Electron traps; Frequency; Potential well; Signal analysis; Silicon; Surface acoustic waves; Surface resistance; Surface waves;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
1972 Ultrasonics Symposium
Type :
conf
DOI :
10.1109/ULTSYM.1972.196058
Filename :
1532998
Link To Document :
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