DocumentCode
2416515
Title
Surface Mobility on Silicon from Acoustoelectric Current Measurements
Author
Cafarella, J.H. ; Bers, A. ; Burke, B.E.
fYear
1972
fDate
1972
Firstpage
181
Lastpage
185
Keywords
Conductivity; Current measurement; Electron traps; Frequency; Potential well; Signal analysis; Silicon; Surface acoustic waves; Surface resistance; Surface waves;
fLanguage
English
Publisher
ieee
Conference_Titel
1972 Ultrasonics Symposium
Type
conf
DOI
10.1109/ULTSYM.1972.196058
Filename
1532998
Link To Document