100 MHz MOSFET Detection of Rayleigh Surface Waves

Author

Defranould, Ph.

fYear

1972

fDate

1972

Firstpage

229

Lastpage

232

Keywords

Conductivity; Frequency; MOSFET circuits; Piezoresistance; Silicon; Stress; Substrates; Surface resistance; Surface waves; Transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

1972 Ultrasonics Symposium

Type

DOI

10.1109/ULTSYM.1972.196070

Filename

1533010

Link To Document