Special Invited Lecture: Integration of Nanostructures with Microsystems

In the past decades, the application of microelectronic and micro/nanotechnologies to the fabrication of solid-state devices stimulated emerging research in micro/nano sensors and actuators. The versatility of semiconductor and micro/nano materials promise new systems with better capabilities and improved performance-to-cost ratio over those of conventionally machined devices. In recent development of nano devices, one key bottleneck has been the integration of nanostructures with Microsystems. This talk will discuss state-of-art integration methodologies of nanostructures with Microsystems using past and on-going efforts. These research results cover various issues in the synthesis and assembly of one-dimensional nanostructures and heterogeneous integration using MEMS as the building blocks including synthesis and assembly of carbon nanotubes, silicon nanowires and zinc oxide nanowires. One common innovation in these projects is the use of localized heating and synthesis such that nanostructures can be grown in a room temperature chamber. Synthesis, directional growth and self-assembly of one-dimensional nanostructures with Microsystems have been demonstrated by means of localized resistive heating, inductive heating: and local electrical field directed, in-situ monitored self-assembly processes. Current research programs will be briefed in the following areas: integrated nanoelectromechanical systems using nanotubes, nanowires and electrospun nanofibers. This talk will conclude with discussions on future research directions.