DocumentCode
2418740
Title
Meniscus Pinned Variable-focus Liquid Lens Based on Electrowetting-on-dielectric
Author
Kang, Ming ; Yue, Ruifeng ; Wu, Jiangang ; Ouyang, Fan ; Liu, Litian
Author_Institution
Inst. of Microelectron., Tsinghua Univ.
fYear
2007
fDate
16-19 Jan. 2007
Firstpage
357
Lastpage
360
Abstract
A novel configuration of variable-focus liquid lens based on electrowetting-on-dielectric technique is presented, which consists of a glass slide growing a conductive indium tin oxide (ITO) film and a hydrophobic dielectric film, a hollow conical metal ring suspended right above, a gap between the slide and the ring, and the lens liquid (water). By changing the voltage applied to grounded metal ring and the ITO control electrode, both the position and curvature of the liquid meniscus can be reversibly adjusted, thus tuning the focal length of the lens. The experimental results show that at a 40 V power supply, the liquid lens is able to focus on objects from 2.5 centimeters up to infinity away with a good imaging quality.
Keywords
microlenses; wetting; 40 V; conductive indium tin oxide film; control electrode; electrowetting-on-dielectric; grounded metal ring; hollow conical metal ring; hydrophobic dielectric film; meniscus pinned variable-focus liquid lens; surface tension; Conductive films; Dielectric films; Electrodes; Glass; High speed optical techniques; Indium tin oxide; Lenses; Optical films; Optical variables control; Voltage; Electrowetting on dielectric; Liquid lens; Surface tension; Variable focus;
fLanguage
English
Publisher
ieee
Conference_Titel
Nano/Micro Engineered and Molecular Systems, 2007. NEMS '07. 2nd IEEE International Conference on
Conference_Location
Bangkok
Print_ISBN
1-4244-0610-2
Type
conf
DOI
10.1109/NEMS.2007.352035
Filename
4160338
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