Title :
Fabrication of Micro-tips by Lift off Process with Contact Shadow Masking
Author :
Kwon, Honam ; Higo, Akio ; Toshiyoshi, Hiroshi
Author_Institution :
Kanagawa Acad. of Sci. & Technol., Kawasaki
Abstract :
We present a simple fabrication method of a micro tip on an electrothermal cantilever actuator, utilizing a lift-off process with a contact shadow mask. Nickel was deposited and patterned to be used as contact shadow mask on the photoresist tip spacer, followed by forming of through-holes for aluminum tips. The radius of the fabricated aluminum tip was found to be 40 nm or less at the apex. The sharp tip was formed on a layered metal cantilever of gold and chromium for electro-thermal actuation. Cantilever was found to deliver a displacement of 0.5 mum with electrical current of 90 mA.
Keywords :
cantilevers; microactuators; photoresists; 90 mA; contact shadow masking; data storage; electrothermal actuation; electrothermal cantilever actuator; evaporation; lift off process; microtips fabrication; photoresist tip spacer; Aluminum; Chromium; Etching; Fabrication; Gold; Memory; Nickel; Resists; Silicon; Systems engineering and theory; contact shadow mask; data storage; evaporation; lift off; tip;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2007. NEMS '07. 2nd IEEE International Conference on
Conference_Location :
Bangkok
Print_ISBN :
1-4244-0610-2
DOI :
10.1109/NEMS.2007.352064
