DocumentCode
2419297
Title
Fabrication of Micro-tips by Lift off Process with Contact Shadow Masking
Author
Kwon, Honam ; Higo, Akio ; Toshiyoshi, Hiroshi
Author_Institution
Kanagawa Acad. of Sci. & Technol., Kawasaki
fYear
2007
fDate
16-19 Jan. 2007
Firstpage
488
Lastpage
492
Abstract
We present a simple fabrication method of a micro tip on an electrothermal cantilever actuator, utilizing a lift-off process with a contact shadow mask. Nickel was deposited and patterned to be used as contact shadow mask on the photoresist tip spacer, followed by forming of through-holes for aluminum tips. The radius of the fabricated aluminum tip was found to be 40 nm or less at the apex. The sharp tip was formed on a layered metal cantilever of gold and chromium for electro-thermal actuation. Cantilever was found to deliver a displacement of 0.5 mum with electrical current of 90 mA.
Keywords
cantilevers; microactuators; photoresists; 90 mA; contact shadow masking; data storage; electrothermal actuation; electrothermal cantilever actuator; evaporation; lift off process; microtips fabrication; photoresist tip spacer; Aluminum; Chromium; Etching; Fabrication; Gold; Memory; Nickel; Resists; Silicon; Systems engineering and theory; contact shadow mask; data storage; evaporation; lift off; tip;
fLanguage
English
Publisher
ieee
Conference_Titel
Nano/Micro Engineered and Molecular Systems, 2007. NEMS '07. 2nd IEEE International Conference on
Conference_Location
Bangkok
Print_ISBN
1-4244-0610-2
Type
conf
DOI
10.1109/NEMS.2007.352064
Filename
4160367
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