Title :
3D High Aspect Ratio Micro Structures Fabricated by One Step UV Lithography
Author :
Yang, W. ; Wang, T. ; Huang, H. ; Fu, C.
Author_Institution :
Inst. of MEMS, National Tsing-Hua Univ.
Abstract :
We are going to present in this paper an interesting idea to fabricate 3D high aspect ratio micro structures. Pillars with different heights can be generated with one step UV lithography. Various 3D micro structures have been successfully fabricated. We will introduce the idea of this approach, fabrication details, and plenty of successful experimental results in this paper. A Taiwan 3D terrain map will be selected to demonstrate the ability of the proposed method.
Keywords :
terrain mapping; ultraviolet lithography; 3D high aspect ratio microstructures; 3D microstructures fabrication; Taiwan 3D terrain map; UV lithography; Back; Fabrication; Light sources; Lithography; Microstructure; Needles; Resists; Synchrotrons; Systems engineering and theory; Viscosity;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2007. NEMS '07. 2nd IEEE International Conference on
Conference_Location :
Bangkok
Print_ISBN :
1-4244-0610-2
DOI :
10.1109/NEMS.2007.352083
