DocumentCode
2420151
Title
Precision Electron Beam Microfabrication of Acoustic Surface Wave Devices
Author
Wolf, E.D. ; Ozdemir, F.S. ; Weglein, R.D.
fYear
1973
fDate
1973
Firstpage
510
Lastpage
516
Keywords
Acoustic devices; Electrodes; Electron beams; Fabrication; Microwave filters; Optical filters; Optical surface waves; Surface acoustic wave devices; Surface acoustic waves; Transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
1973 Ultrasonics Symposium
Type
conf
DOI
10.1109/ULTSYM.1973.196254
Filename
1533194
Link To Document