High Resolution SWD Pattern Replication Without Photo-Chemical Processing

Author

Staples, E.J.

fYear

1973

fDate

1973

Firstpage

522

Lastpage

524

Keywords

Electrodes; Etching; Fabrication; Filters; Gold; Instruments; Silicon; Sputtering; Substrates; Surface waves;

fLanguage

English

Publisher

ieee

Conference_Titel

1973 Ultrasonics Symposium

Type

DOI

10.1109/ULTSYM.1973.196256

Filename

1533196

Link To Document