DocumentCode
2420196
Title
A Surface Wave Thickness Monitor for Thin Evaporated Films
Author
Hemphill, R.B.
fYear
1973
fDate
1973
Firstpage
525
Lastpage
529
Keywords
Crystalline materials; Delay lines; Gold; Lithium niobate; Monitoring; Optical surface waves; Oscillators; Surface waves; Thickness measurement; Vacuum systems;
fLanguage
English
Publisher
ieee
Conference_Titel
1973 Ultrasonics Symposium
Type
conf
DOI
10.1109/ULTSYM.1973.196257
Filename
1533197
Link To Document