Development of an Innovative Micro Capacitive Humidity Sensor With Double Polyimide Films and Interlacing Out-of-plane Electrodes Structure

Author

Huang, I-Yu ; Lee, Yao-Yu ; Lin, Chang-Yu

Author_Institution

Dept. of Electr. Eng., Nat. Sun Yat-Sen Univ.

fYear

2007

fDate

16-19 Jan. 2007

Firstpage

745

Lastpage

748

Abstract

This paper presents the design, fabrication and complete characterization of an innovative capacitive relative humidity (%RH) microsensor. The double polyimide (PI) thin films adopted in this study function as a humidity sensing layer and a protecting layer of top electrodes respectively. To improve the humidity sensitivity and responding speed, interlacing out-of-plane electrodes are designed in the RH microsensor. The very low hysteresis (0.24 %RH), high sensitivity (1.25 pF/%RH), high accuracy (plusmn1.12 %RH) and fast response (within 1 second) characteristics of the RH microsensor have been demonstrated in this research.

Keywords

electrodes; humidity sensors; microsensors; thin films; double polyimide thin films; humidity sensing layer; humidity sensitivity; microcapacitive humidity sensor; microsensor; Capacitive sensors; Electrodes; Fabrication; Humidity; Hysteresis; Microsensors; Polyimides; Protection; Sensor phenomena and characterization; Transistors; Polyimide; capacitive %RH microsensor; humidity;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems, 2007. NEMS '07. 2nd IEEE International Conference on

Conference_Location

Bangkok

Print_ISBN

1-4244-0610-2

Type

conf

DOI

10.1109/NEMS.2007.352125

Filename

4160428