Design and fabrication of a 3-D nanogap electrode grid array biosensor

With the development of biotechnology and nanotechnology, a kind of 3-D nanogap electrode grid array biosensor is designed based on dielectrophoresis, impedance method and NEMS technology. This chip is expected to separate and detect cells label freely by electrical method. Researches are mainly done about the most important problem on fabrication of the biosensor and a new technology is developed. The sidewall etching of RIE is used to form thin nanogap metal cantilevers which configurate the 3-D nanogap electrode grid array structure. Anisotropy of RIE is modeled and the etching profiles are simulated. This method is proved to be applicable by analysis and experiments.