Title :
Fabrication of Titania Nanopoles by Nanoporous Alumina Template
Author :
Her, Hyun-Jung ; Kim, Jung-Min ; Kim, Jaewan ; Choi, Y.J. ; Kang, C.J. ; Kim, Yong-Sang
Author_Institution :
Dept. of Nano Sci. & Eng., Myongji Univ.
Abstract :
The paper demonstrate a formation of thin film titania (TiO2) with dense array of nanopoles and nanopores. The heights of poles and pores are 180 nm and 130 nm, respectively. In order to get titania nanopoles and nanopores, the authors make a nanoporous alumina (A12O3) template through a two-step anodization process, which is essential for the uniform and densified nanopores on aluminum surface. Nano-structured titania films were spin-coated under sol-gel state. The spin-coated titania films were then uniformly patterned by nanoimprinting lithography technique with textured PMMA mold or nanoporous alumina template. These fabricated titania films are very useful for solar cells, photocatalytic and sensing applications wherein nano-structuring of surface with controlled dimensions are vital.
Keywords :
alumina; anodisation; nanolithography; nanoporous materials; sol-gel processing; titanium compounds; Al2O3; PMMA mold; TiO2; anodization process; nanoimprinting lithography; nanoporous alumina template; sol-gel state; solar cells; thin film titania; titania nanopoles; Aluminum; Excitons; Fabrication; Lithography; Nanoporous materials; Optical surface waves; Photovoltaic cells; Photovoltaic systems; Semiconductor materials; Solar power generation; nanopoles titania; nanopores titania; nanoporous alumina template;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2007. NEMS '07. 2nd IEEE International Conference on
Conference_Location :
Bangkok
Print_ISBN :
1-4244-0610-2
DOI :
10.1109/NEMS.2007.352135