DocumentCode :
2421046
Title :
Strain Effects in ZnO Thin Film SAW Devices
Author :
Nalamwar, A.L. ; Epstein, M.
fYear :
1974
fDate :
1974
Firstpage :
129
Lastpage :
131
Keywords :
Acoustic devices; Capacitive sensors; Delay effects; Strain measurement; Substrates; Surface acoustic wave devices; Surface acoustic waves; Tensile strain; Thin film devices; Zinc oxide;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
1974 Ultrasonics Symposium
Type :
conf
DOI :
10.1109/ULTSYM.1974.196302
Filename :
1533242
Link To Document :
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