Title :
Strain Effects in ZnO Thin Film SAW Devices
Author :
Nalamwar, A.L. ; Epstein, M.
Keywords :
Acoustic devices; Capacitive sensors; Delay effects; Strain measurement; Substrates; Surface acoustic wave devices; Surface acoustic waves; Tensile strain; Thin film devices; Zinc oxide;
Conference_Titel :
1974 Ultrasonics Symposium
DOI :
10.1109/ULTSYM.1974.196302