Multimodal control of a microrobot in an SEM-based nanohandling station

The multimodal teleoperation interface has to improve the human control over the microrobots and the overall nanohandling station by immersing the user into the microworld in which the nanohandling procedures take place. The user will receive more information about the state of the nanohandling process and in a more convenient way than by other existing teleoperation interfaces: Force information by the haptic interface, acoustical information by headphones and visual information from the scanning electron microscope (SEM) by the head-mounted display. The SEM-based microassembly station being developed at the Division of Microrobotics and Control Engineering (AMiR) at Oldenburg University is introduced. The construction of the developed haptic device and the control system architecture are described. A Sugeno/Takagi-type fuzzy interpolator is used for the processing of the haptic device´s signals.