MEMS for distributed wireless sensor networks

Author

Warneke, Brett A. ; Pister, Kristofer S J

Author_Institution

Sensor & Actuator Center, California Univ., Berkeley, CA, USA

Volume

1

fYear

2002

fDate

2002

Firstpage

291

Abstract

MEMS technology is enabling the development of inexpensive, autonomous wireless sensor nodes with volumes ranging from cubic mm to several cubic cm. These tiny sensor nodes can form rapidly deployed, massive distributed networks to allow unobtrusive, spatially dense, sensing and communication. MEMS enable these devices by reducing both the volume and energy consumption of various components. This paper reviews some of the wireless sensor nodes under development and applicable MEMS devices for small and efficient optical communication, micropower generation, and sensing. In addition, CMOS post-process micromachining is discussed as a method of achieving low cost and high integration.

Keywords

distributed sensors; micromachining; microsensors; military equipment; optical communication equipment; radio networks; CMOS post-process micromachining; MEMS distributed wireless sensor networks; MEMS low cost integration; communication networks; inexpensive autonomous wireless sensor nodes; micropower generation; optical communication; rapidly deployed massive distributed networks; sensing devices; sensor volumes; unobtrusive spatially dense sensing; volume/energy consumption reduction; Actuators; CMOS process; Circuits; Energy consumption; Etching; Intelligent sensors; Micromechanical devices; Sensor systems; Space technology; Wireless sensor networks;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronics, Circuits and Systems, 2002. 9th International Conference on

Print_ISBN

0-7803-7596-3

Type

conf

DOI

10.1109/ICECS.2002.1045391

Filename

1045391