• DocumentCode
    2421471
  • Title

    Accurate prediction of IC manufacturing distributions using improved response surface fitting

  • Author

    Nilsen, V.K. ; Walton, A.J.

  • Author_Institution
    Dept. of Electron. & Electr. Eng., Edinburgh Univ., UK
  • fYear
    2000
  • fDate
    2000
  • Firstpage
    15
  • Lastpage
    18
  • Abstract
    This paper presents an improved method of generating response distributions by using a covariance fit for the surfaces, enabling manufacturing distributions to be more accurately predicted. Response surfaces and distributions are compared for covariance and polynomial models for both a known response and for actual simulation data and the improvements in the predicted distributions highlighted
  • Keywords
    covariance analysis; integrated circuit manufacture; integrated circuit modelling; polynomials; IC manufacturing distributions; covariance fit; covariance models; manufacturing distributions; polynomial models; response distributions; response surface fitting; simulation data; Design for experiments; Equations; Polynomials; Power generation; Predictive models; Pulp manufacturing; Response surface methodology; Surface fitting; Virtual manufacturing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Statistical Metrology, 2000 5th International Workshop on
  • Conference_Location
    Honolulu, HI
  • Print_ISBN
    0-7803-5896-1
  • Type

    conf

  • DOI
    10.1109/IWSTM.2000.869301
  • Filename
    869301
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2421471