DocumentCode
2421713
Title
Aluminum Nitride on Sapphire
Author
Lakin, K.M. ; Liu, J. ; Wang, K.
fYear
1974
fDate
1974
Firstpage
302
Lastpage
306
Keywords
Acoustic propagation; Acoustic waves; Aluminum nitride; Chemicals; Epitaxial growth; Semiconductor films; Substrates; Surface acoustic wave devices; Surface morphology; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
1974 Ultrasonics Symposium
Type
conf
DOI
10.1109/ULTSYM.1974.196341
Filename
1533281
Link To Document