Title :
Microelectronic moisture sensor from variable dielectric capacitances of polyimide film
Author :
Ellis, Charles D. ; Davidson, James L. ; Baginski, Thomas A.
Author_Institution :
Auburn Univ., AL, USA
Abstract :
Three moisture sensors were investigated which use the moisture-dependent dielectric constant of a polyimide film as the sensing variable. The sensitivity varies from 0.04 to 0.7 pF/%RH, the response time varies from 4 to 1000 s, and the temperature sensitivity varies from negligible to 0.05 pF/°C. A hybrid microcircuit was designed and fabricated which converts the sensor´s capacitance to a voltage
Keywords :
electric sensing devices; hybrid integrated circuits; moisture measurement; permittivity; polymer films; dielectric constant; hybrid microcircuit; moisture sensors; polyimide film; response time; sensing variable; sensitivity; temperature sensitivity; variable dielectric capacitances; Capacitance; Capacitive sensors; Delay; Dielectric constant; Hybrid integrated circuits; Microelectronics; Moisture; Polyimides; Temperature sensors; Voltage;
Conference_Titel :
University/Government/Industry Microelectronics Symposium, 1989. Proceedings., Eighth
Conference_Location :
Westborough, MA
DOI :
10.1109/UGIM.1989.37308
