Title :
Piezoelectric micropump with microvalves
Author_Institution :
Dept. of Electr., Comput. & Syst. Eng., Boston Univ., MA, USA
Abstract :
A silicon micropump, provided with piezoelectric valves, which can be manufactured by established integrated circuit techniques, is described. The micropump can be used to pump liquids or gases at a very low rate, which can be accurately prescribed. The body of the pump and the valves are made of silicon and glass, and contain piezoelectric material which allows opening and closing the valves electrically. Pumping speeds up to 3 μl/min were shown to be feasible and a pressure of 60 cm of water could be achieved
Keywords :
piezoelectric devices; pumps; valves; Si; integrated circuit techniques; micropump; microvalves; piezoelectric material; piezoelectric valves; pressure; pumping speeds; Computer aided manufacturing; Coolants; Drugs; Insulin; Micropumps; Microvalves; Piezoelectric materials; Silicon; Valves; Voltage;
Conference_Titel :
University/Government/Industry Microelectronics Symposium, 1989. Proceedings., Eighth
Conference_Location :
Westborough, MA
DOI :
10.1109/UGIM.1989.37309
