Title :
Care and feeding of a university cleanroom facility
Author :
Runkle, G.A. ; Blondell, S.P. ; Fuller, L.F. ; Lane, R.L. ; Pearson, R.E. ; Smith, B.W. ; Turkham, I.R. ; Hesler, K.H. ; Kurinec, S.K.
Author_Institution :
Dept. of Microelectron. Eng., Rochester Inst. of Technol., NY, USA
Abstract :
The authors describe the systems that have been established for the operation of the microelectronics facility at the Rochester Institute of Technology. Attention is given to the organizational structure; support facilities; cleanroom maintenance; lab equipment; equipment operation; lab supplies, inventory, and control; lab safety; and the hazardous waste program
Keywords :
laboratory apparatus and techniques; safety; semiconductor technology; Rochester Institute of Technology; hazardous waste program; inventory; lab equipment; lab supplies; maintenance; microelectronics facility; organizational structure; safety; support facilities; university cleanroom facility; Contracts; Costs; Engineering management; Laboratories; Maintenance engineering; Microelectronics; Personnel; Safety; Space technology; Temperature measurement;
Conference_Titel :
University/Government/Industry Microelectronics Symposium, 1989. Proceedings., Eighth
Conference_Location :
Westborough, MA
DOI :
10.1109/UGIM.1989.37314
