Effect of prepared conditions on soft magnetic properties and microstructure of CoFeHfO thin film

CoFeHfO thin films have been prepared by RF sputtering method. Prepared conditions are the most important to take shape microstructure of thin films. In order to find out the optimal conditions to fabricate CoFeHfO thin films which exhibit the best magnetic properties to application for high frequency, relation between prepared conditions and soft magnetic properties have been investigated. The results shows that excellent soft magnetic properties were associated strongly with orientation and grain size of alpha-CoFe and alpha-Co(Fe) phases. Orientation of nanocrystalline depends strongly on the time sputtering (film thickness) because of interaction energy. Grain size and resistivity depend on oxygen and deposition rate because of reaction when sputtering. Consequently, the film with thickness of 300 nm and partial of oxygen of 6% is nearly single phased and exhibits excellence magnetic properties with the value of coercivity H_c of 0.18 Oe and anisotropy magnetic H_k of 49.92 Oe, along the hard axis.