• DocumentCode
    2422551
  • Title

    Development of ferroelectric materials for memory applications

  • Author

    Kulkarni, A.K. ; Rohrer, G.A.

  • Author_Institution
    Dept. of Electr. Eng., Michigan Technol. Univ., Houghton, MI, USA
  • fYear
    1989
  • fDate
    12-14 Jun 1989
  • Firstpage
    150
  • Lastpage
    155
  • Abstract
    A detailed investigation on the electrical, structural, and fatigue characteristics of thin-film ferroelectric memory devices fabricated from potassium nitrate-phase III (KNO3-III) was conducted. This research involved: (1) fabrication and processing of 16×16 (256-bit) capacitor-type memory devices; (2) electrical characterization, i.e. pulse switching, current-voltage, capacitance -voltage, and hysteresis measurements; (3) structural characterization, i.e. inert ion sputter depth profiles by an Auger electron spectrometer; and (4) fatigue testing, i.e. measurement of polarization charge as a function of read-write cycles. From the experimental results, it appears that the fatigue is most probably caused by the trapping of mobile ions at the metal-ferroelectric interfaces
  • Keywords
    Auger effect; electron spectroscopy; fatigue testing; ferroelectric devices; potassium compounds; 256 bit; Auger electron spectrometer; KNO3; capacitance -voltage; capacitor-type memory devices; current-voltage; electrical characterization; fatigue characteristics; ferroelectric materials; hysteresis measurements; inert ion sputter depth profiles; memory applications; metal-ferroelectric interfaces; polarization charge; pulse switching; read-write cycles; structural characterization; thin-film ferroelectric memory devices; trapping; Capacitance measurement; Charge measurement; Current measurement; Electric variables measurement; Fabrication; Fatigue; Ferroelectric materials; Pulse measurements; Sputtering; Thin film devices;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    University/Government/Industry Microelectronics Symposium, 1989. Proceedings., Eighth
  • Conference_Location
    Westborough, MA
  • ISSN
    0749-6877
  • Type

    conf

  • DOI
    10.1109/UGIM.1989.37324
  • Filename
    37324