DocumentCode :
2422551
Title :
Development of ferroelectric materials for memory applications
Author :
Kulkarni, A.K. ; Rohrer, G.A.
Author_Institution :
Dept. of Electr. Eng., Michigan Technol. Univ., Houghton, MI, USA
fYear :
1989
fDate :
12-14 Jun 1989
Firstpage :
150
Lastpage :
155
Abstract :
A detailed investigation on the electrical, structural, and fatigue characteristics of thin-film ferroelectric memory devices fabricated from potassium nitrate-phase III (KNO3-III) was conducted. This research involved: (1) fabrication and processing of 16×16 (256-bit) capacitor-type memory devices; (2) electrical characterization, i.e. pulse switching, current-voltage, capacitance -voltage, and hysteresis measurements; (3) structural characterization, i.e. inert ion sputter depth profiles by an Auger electron spectrometer; and (4) fatigue testing, i.e. measurement of polarization charge as a function of read-write cycles. From the experimental results, it appears that the fatigue is most probably caused by the trapping of mobile ions at the metal-ferroelectric interfaces
Keywords :
Auger effect; electron spectroscopy; fatigue testing; ferroelectric devices; potassium compounds; 256 bit; Auger electron spectrometer; KNO3; capacitance -voltage; capacitor-type memory devices; current-voltage; electrical characterization; fatigue characteristics; ferroelectric materials; hysteresis measurements; inert ion sputter depth profiles; memory applications; metal-ferroelectric interfaces; polarization charge; pulse switching; read-write cycles; structural characterization; thin-film ferroelectric memory devices; trapping; Capacitance measurement; Charge measurement; Current measurement; Electric variables measurement; Fabrication; Fatigue; Ferroelectric materials; Pulse measurements; Sputtering; Thin film devices;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
University/Government/Industry Microelectronics Symposium, 1989. Proceedings., Eighth
Conference_Location :
Westborough, MA
ISSN :
0749-6877
Type :
conf
DOI :
10.1109/UGIM.1989.37324
Filename :
37324
Link To Document :
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