Title :
Surface Profile and Optical Properties of Sb-doped SnO2 Thin Films
Author :
Hutagalung, Sabar D. ; Lee, Boon Y.
Author_Institution :
Sch. of Mater. & Miner. Resources Eng., Universiti Sains Malaysia, Penang
Abstract :
Tin oxide (SnO2) and antimony-doped tin oxide (SnO2:Sb) thin films were deposited on the microscope slide glass substrates by sol-gel dip coating technique. Precursor solution was prepared using tin(IV) chloride pentahydrate, antimony chloride, urea, and hydrochloric acid. The Sb dopant concentration was varied from 1 to 4 mol% to investigate the effect of doping on the optical and surface roughness of the films. AFM image showed that undoped films having a very smooth surface morphology with nanostructure grain size in the range of 37.6 to 56.3 nm. Meanwhile, Sb-doped SnO2 was more roughness if compared to undoped one. The optical properties of the films have been studied from transmission spectra in the ultraviolet-visible wavelength range. Energy gap of Sb-doped SnO2 thin films are in the range of 4.07-4.11 eV, shifted to the lower value with increased doping concentration.
Keywords :
antimony; doping profiles; optical properties; semiconductor doping; semiconductor thin films; sol-gel processing; tin compounds; SnO2:Sb; microscope slide glass substrates; optical properties; sol gel dip coating; surface profile; thin films; Atomic force microscopy; Doping; Glass; Optical films; Optical surface waves; Rough surfaces; Sputtering; Surface morphology; Surface roughness; Tin; SnO2:Sb; optical properties; sol-gel; surface profile; thin films;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2007. NEMS '07. 2nd IEEE International Conference on
Conference_Location :
Bangkok
Print_ISBN :
1-4244-0610-2
DOI :
10.1109/NEMS.2007.352266