Data Analysis Method for MEMS Dynamic Characterization Based on Stroboscopic Interferometer System

Author

Wang, Haishan ; Liu, Shiyuan ; Shi, Tielin ; Xie, Yongjun

Author_Institution

Sch. of Mech. Sci. & Eng., Huazhong Univ. of Sci. & Technol.

fYear

2007

fDate

16-19 Jan. 2007

Firstpage

269

Lastpage

273

Abstract

Stroboscopic interferometer system is a kind of excellent measurement system for MEMS characterization which can measure the motion of whole MEMS structure in the vision filed, and the dynamic properties such as eigenfrequency and vibration modal shape can be obtained. This paper presents a data analysis method for MEMS dynamic characterization based on stroboscopic interferometer system, which establishes an element dynamic model by discretizing the MEMS structure into finite elements. On the basis of analyzing the amplitude and phase difference of these elements, dynamic equation of the element is established. As an example, a dynamic model of micro cantilever was established and the measurement data of an AFM cantilever were analyzed by this method. The dynamic properties such as thickness distribution and the damping distribution were extracted.

Keywords

data analysis; finite element analysis; light interferometers; micromechanical devices; stroboscopes; MEMS structure; data analysis method; dynamic characterization; dynamic equation; element dynamic model; measurement system; stroboscopic interferometer system; Data analysis; Data mining; Finite element methods; Micromechanical devices; Microstructure; Motion analysis; Motion measurement; Optical interferometry; Shape measurement; Vibration measurement; MEMS; cantilever element model; dynamics characterization; element dynamic model; finite element; stroboxcopic interferometry system;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems, 2007. NEMS '07. 2nd IEEE International Conference on

Conference_Location

Bangkok

Print_ISBN

1-4244-0610-2

Type

conf

DOI

10.1109/NEMS.2007.352024

Filename

4160582