DocumentCode
2423269
Title
Resonance charaterizaion of multi-wall cabon nanotubes
Author
Song, Jin-Won ; Lee, Jong-Hong ; Seo, Hee Won ; Lee, Eung-Sug ; Han, Chang-Soo
Author_Institution
Nano-Mech. Syst. Res. Center, Korea Inst. of Machinery & Mater.
fYear
2007
fDate
16-19 Jan. 2007
Firstpage
282
Lastpage
285
Abstract
We report the suspended assembly for the fabrication of resonator using multi-wall carbon nanotubes (MWNT). To vibrate a MWNT on plane surface, it should need suspension of a MWNT across trench electrodes. So we propose fabrication method of a MWNT resonator using dielectrophoresis (DEP). By drying the solution during DEP assembly, the capillary force pulls the MWNT toward the bottom substrate, and the MWNT then remains as a deformed structure adhering on the bottom substrate after the solution has dried out. Show successful results which are some SEM images of suspended MWNT. And so, resonances can be detected.
Keywords
assembling; carbon nanotubes; electrophoresis; microelectrodes; micromechanical resonators; MWNT resonator; SEM images; dielectrophoresis assembly; multi-wall carbon nanotubes; resonance characterizaion; suspended assembly; Assembly systems; Carbon nanotubes; Chemicals; Dielectrophoresis; Electrodes; Fabrication; Lithography; Nanoelectromechanical systems; Nanostructures; Resonance; dielectrophoresis; multi-wall carbon nanotubes; resonance; suspension;
fLanguage
English
Publisher
ieee
Conference_Titel
Nano/Micro Engineered and Molecular Systems, 2007. NEMS '07. 2nd IEEE International Conference on
Conference_Location
Bangkok
Print_ISBN
1-4244-0610-2
Type
conf
DOI
10.1109/NEMS.2007.352027
Filename
4160585
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