Title :
Resonance charaterizaion of multi-wall cabon nanotubes
Author :
Song, Jin-Won ; Lee, Jong-Hong ; Seo, Hee Won ; Lee, Eung-Sug ; Han, Chang-Soo
Author_Institution :
Nano-Mech. Syst. Res. Center, Korea Inst. of Machinery & Mater.
Abstract :
We report the suspended assembly for the fabrication of resonator using multi-wall carbon nanotubes (MWNT). To vibrate a MWNT on plane surface, it should need suspension of a MWNT across trench electrodes. So we propose fabrication method of a MWNT resonator using dielectrophoresis (DEP). By drying the solution during DEP assembly, the capillary force pulls the MWNT toward the bottom substrate, and the MWNT then remains as a deformed structure adhering on the bottom substrate after the solution has dried out. Show successful results which are some SEM images of suspended MWNT. And so, resonances can be detected.
Keywords :
assembling; carbon nanotubes; electrophoresis; microelectrodes; micromechanical resonators; MWNT resonator; SEM images; dielectrophoresis assembly; multi-wall carbon nanotubes; resonance characterizaion; suspended assembly; Assembly systems; Carbon nanotubes; Chemicals; Dielectrophoresis; Electrodes; Fabrication; Lithography; Nanoelectromechanical systems; Nanostructures; Resonance; dielectrophoresis; multi-wall carbon nanotubes; resonance; suspension;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2007. NEMS '07. 2nd IEEE International Conference on
Conference_Location :
Bangkok
Print_ISBN :
1-4244-0610-2
DOI :
10.1109/NEMS.2007.352027