DocumentCode
2425136
Title
Designing of microelectromechanical structures for built-in systems using CAD tools
Author
Lobur, Mykhaylo
Author_Institution
CAD/CAM Dept., Lviv Polytech. Nat. Univ., Ukraine
fYear
2003
fDate
18-22 Feb. 2003
Firstpage
77
Lastpage
78
Abstract
This paper present few approaches to modeling and simulation of micro-electromechanical structures using CFDRC software and VHDL-AMS language.
Keywords
CAD; computational fluid dynamics; data visualisation; hardware description languages; microfluidics; micromechanical devices; semiconductor device models; software tools; 3D visualization; CAD tools; CFD ACE; CFDRC software; VHDL-AMS; microelectromechanical structures; modeling; simulation; software package; three-dimensional model; Application software; Circuit simulation; Circuit topology; Computational fluid dynamics; Design automation; Filters; Integrated circuit modeling; Microelectromechanical systems; Micromechanical devices; Software packages;
fLanguage
English
Publisher
ieee
Conference_Titel
CAD Systems in Microelectronics, 2003. CADSM 2003. Proceedings of the 7th International Conference. The Experience of Designing and Application of
Print_ISBN
966-553-278-2
Type
conf
DOI
10.1109/CADSM.2003.1254988
Filename
1254988
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