Title :
RF MEMS filter based on one step of copper electroplating
Author :
Liu, Yu ; Li, Xiuhan ; Fang, Dongming ; Zhang, Haixia
Author_Institution :
MEMS Res. Center, Peking Univ., Beijing, China
Abstract :
A MEMS RF Filter on glass substrate has been designed, simulated, fabricated and tested. The fabrication process has been developed based on copper electroplating, which is compatible with the copper inductor fabrication process, so it can be integrated into LC filter. Finally, spiral capacitors with different dimensions and LC filters have been fabricated successfully. Then a detailed analysis of the frequency response of the filters is presented according to the test result from network analyzer.
Keywords :
copper; electroplating; micromechanical devices; radiofrequency filters; Cu; LC filter; RF MEMS filter; electroplating; glass substrate; inductor fabrication process; network analyzer; spiral capacitors; HFSS; MEMS RF Filter; copper electroplating;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on
Conference_Location :
Xiamen
Print_ISBN :
978-1-4244-6543-9
DOI :
10.1109/NEMS.2010.5592111
