Title :
Plasma Etched Quartz SAW Resonators
Author :
Miller, S.P. ; Stingall, R.E. ; Shreve, W.R.
Keywords :
Etching; Fabrication; Glow discharges; Plasma applications; Plasma chemistry; Plasma devices; Plasma materials processing; Plasma temperature; Radio frequency; Surface acoustic waves;
Conference_Titel :
1975 Ultrasonics Symposium
DOI :
10.1109/ULTSYM.1975.196564
