DocumentCode
2425672
Title
Plasma Etched Quartz SAW Resonators
Author
Miller, S.P. ; Stingall, R.E. ; Shreve, W.R.
fYear
1975
fDate
1975
Firstpage
474
Lastpage
477
Keywords
Etching; Fabrication; Glow discharges; Plasma applications; Plasma chemistry; Plasma devices; Plasma materials processing; Plasma temperature; Radio frequency; Surface acoustic waves;
fLanguage
English
Publisher
ieee
Conference_Titel
1975 Ultrasonics Symposium
Type
conf
DOI
10.1109/ULTSYM.1975.196564
Filename
1533504
Link To Document