DocumentCode
2425890
Title
Planar Microwave Bulk Delay Line in Silicon
Author
McAvoy, B.R. ; de Klerk, J.
fYear
1975
fDate
1975
Firstpage
526
Lastpage
528
Keywords
Acoustic transducers; Acoustic waves; Delay lines; Fabrication; Frequency; Propagation losses; Silicon; Substrates; Ultrasonic transducers; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
1975 Ultrasonics Symposium
Type
conf
DOI
10.1109/ULTSYM.1975.196577
Filename
1533517
Link To Document