Title :
Planar Microwave Bulk Delay Line in Silicon
Author :
McAvoy, B.R. ; de Klerk, J.
Keywords :
Acoustic transducers; Acoustic waves; Delay lines; Fabrication; Frequency; Propagation losses; Silicon; Substrates; Ultrasonic transducers; Zinc oxide;
Conference_Titel :
1975 Ultrasonics Symposium
DOI :
10.1109/ULTSYM.1975.196577
