Title :
Production results of X-band GaAs MMIC 5-bit phase shifters
Author :
Ali, Farahiyah ; Mitchell, S. ; Murphy, A. ; Adar, A. ; Ho, P. ; Podell, A.
Author_Institution :
Pacific Monolithics, Sunnyvale, CA, USA
Abstract :
The measured results of the production of high-performance, highly reproducible, small-size (96 mils*48 mils) GaAs monolithic 5-b phase shifters for phased array system applications are presented. Very good DC ( >90%) and RF (75%-80%) yields have been achieved on an X-band phase shifter. The performance correlation of these phase shifters between wafer-level results and assembled-module-level data has been verified.<>
Keywords :
III-V semiconductors; MMIC; gallium arsenide; integrated circuit manufacture; packaging; phase shifters; 5 bit; 5-bit phase shifters; 96 to 48 mil; GaAs; MMIC; X-band phase shifter; assembled-module-level data; highly reproducible; phased array system applications; production results; wafer-level results; yields; Circuits; Gallium arsenide; MMICs; Manufacturing; Phase measurement; Phase shifters; Phased arrays; Probes; Production systems; Radio frequency;
Conference_Titel :
Microwave Symposium Digest, 1990., IEEE MTT-S International
Conference_Location :
Dallas, TX
DOI :
10.1109/MWSYM.1990.99659
