Fabrication of flexible micro flow sensor for use in micro reformer

Mass production of micro-reformers raises various problems still unsolved, such as the evaluation of their internal temperature and flow rate. Such issues influence the efficiency of micro reformers. To our knowledge, no investigation has elucidated the internal operation of micro reformers. Hence, this work fabricates micro flow sensors on a flexible substrate using the micro-electro-mechanical systems (MEMS) technique within the micro reformer. This study investigated the feasibility of the aqua regia by wet etching in controlling the depth, width and roughness of a stainless steel flow channel. In the future, a micro thermal sensor in a micro-reformer will be applied to yield values of operating parameters to improve micro-reformer design and performance. The reaction inside the micro-reformer must be controlled and adjusted in real time. Experimental results demonstrate that the accuracy and sensitivity of the micro thermal sensor was 0.5°C and 1.805×10^-3/°C, respectively.