Design and fabrication of a MEMS scanning mirror with and without comb offset

Author

Chan, Yick Chuen ; Wong, Chun Cheong ; Wang, Congshun ; Ma, Wei ; Chan, Ho-Yin ; Chen, Shoulung ; Cheung, Hon Lung ; Lee, Francis Chee Shuen ; Tsai, Chen-Jung

Author_Institution

Mater. & Packaging Technol. Group, Hong Kong Appl. Sci. & Technol. Res. Inst. Co. Ltd., Hong Kong, China

fYear

2010

fDate

20-23 Jan. 2010

Firstpage

186

Lastpage

190

Abstract

The design, fabrication and characterization of an electrostatic-type bi-axial MEMS scanning mirror operating with inter-digitated comb fingers are presented. The effect of comb offset on device actuation is examined. In addition to standard designs with and without comb offset, a novel asymmetric mirror plate was designed to introduce an imbalance. It was found that all the three designs can be actuated properly without significant differences. These fabricated devices all offer optical scanning angles of >20° and can be integrated in a laser scanning projection (LSP) module for pico-projector applications.

Keywords

micromechanical devices; micromirrors; asymmetric mirror plate; comb offset; device actuation; electrostatic-type biaxial MEMS scanning mirror; interdigitated comb fingers; laser scanning projection module; picoprojector applications;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on

Conference_Location

Xiamen

Print_ISBN

978-1-4244-6543-9

Type

conf

DOI

10.1109/NEMS.2010.5592180

Filename

5592180