Title :
Application of SAW Delay Line Attenuation and Transverse Acoustoelectric Voltage for Determination of Semiconductor Surface Properties
Author :
Motamedi, M.E. ; Webster, R.T. ; Das, P.
Keywords :
Acoustic pulses; Acoustic waves; Attenuation; Capacitance; Convolvers; Delay lines; Substrates; Surface acoustic wave devices; Surface acoustic waves; Voltage;
Conference_Titel :
1975 Ultrasonics Symposium
DOI :
10.1109/ULTSYM.1975.196612