TbDyFe deposition experiments by evaporation on optical fiber

Schematic of a new type of Mach-Zehnder interferential magnetic sensor is illustrated. TbDyFe is used as the magnetostrictive material which is coated on the round surface of the sensing optical fiber. The deposition experiments are done using electron beam evaporation system. Three main process parameters, temperature, vacuum and deposition rate, which affect the TbDyFe deposition quality seriously, are analyzed by experiments. The deposited TbDyFe film is observed using electron microscope. The optimized parameters of TbDyFe coating with electron beam evaporation deposition method are acquired: temperature 350°C, vacuum degree 9.6×10^-5 Pa and deposition rate 1Å/s.