• DocumentCode
    2426979
  • Title

    Fabrication of micropattern grating platform for sensing bio-molecule interaction

  • Author

    Chathirat, N. ; Atthi, N. ; Hruanun, Chamdet ; Poyai, Amporn ; Osotchan, Tanakorn ; Dangtip, S.

  • fYear
    2010
  • fDate
    20-23 Jan. 2010
  • Firstpage
    241
  • Lastpage
    244
  • Abstract
    Device consisting of a micro-pattern grating structure with membrane of alternating dielectric materials such as SiO2, Si3N4 and SOG or ITO, is fabricated. Its utilization as a platform for attaching active silane layer such as APTES, further as a sensor after immobilizing of sensing molecules and hybridizing with complimentary molecules is demonstrated. Shifting in peak wavelength is observed when new layer is introduced onto the platform.
  • Keywords
    bioMEMS; biochemistry; biosensors; dielectric materials; indium compounds; molecular biophysics; silicon compounds; APTES; ITO; InSnO; SOG; Si3N4; SiO2; active silane layer; alternating dielectric materials; biomolecule interaction; micropattern grating platform; peak wavelength shift; sensor fabrication; Bio-molecule; Grating; Micropattern; Peak Wavelength Shift; sensor fabrication;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on
  • Conference_Location
    Xiamen
  • Print_ISBN
    978-1-4244-6543-9
  • Type

    conf

  • DOI
    10.1109/NEMS.2010.5592203
  • Filename
    5592203
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2426979