Theory and experiment of field-emitter arrays with planar lens focusing

Summary form only given, as follows. Planar lens focusing with (FEAs) was first observed for configuration where the focusing field is formed by the substrate. In this paper, we report on the fabrication, experiments and simulations of FEA configurations, where lens electrodes are provided with independent controls. The FEAs are silicon cones on mini-columns fabricated by MCNC. The field-emitters are approximately 0.7 /spl mu/m in height and 0.4 /spl mu/m in diameter and gate aperture diameters about 1.1 /spl mu/m. A number of linear gate and lens geometries are fabrication: gate widths from 4 /spl mu/m to 6 /spl mu/m and gate to lens gaps from 2 /spl mu/m to 3 /spl mu/m. We will report the experimental data from these devices. Their electron trajectories will be compared to numerical simulations.