Title :
Analytical modelling and simulations of a MEMS micro-mirror - MATLAB implementation
Author :
Cichalewski, Wojciech ; Napieralski, Andrzej ; Camon, Henri ; Estibals, Bruno
Author_Institution :
Dept. of Microelectron. & Comput. Sci., Tech. Univ. Lodz, Poland
Abstract :
This paper is devoted to the study of the static and dynamical behaviour of a ID torsion single crystal silicon micro-mirror. The aim is to create a parametric model of such mirror allowing to use a simple calculation program to avoid expensive and long FEM simulations. This study tries to put in place a modelling to define the best structure with regard to various specification by taking into account the technological possibilities and to simulate the experimental characteristics before the expensive technological process.
Keywords :
Runge-Kutta methods; damping; electrostatic actuators; micromirrors; optical design techniques; optical engineering computing; physics computing; silicon; torque; torsion; transient response; 1D torsion mirror; MATLAB implementation; MEMS micromirror; Runge-Kutta method; angular acceleration; damping coefficient; dynamical behaviour; electrostatic mirror; inclined electrodes; mirror actuation; parametric model; planar electrodes; resonant frequency; single crystal micromirror; static behaviour; steady-state behaviour; torque; transient response; Analytical models; Electrodes; Electrostatics; MATLAB; Mathematical model; Micromechanical devices; Mirrors; Silicon; Torque; Voltage;
Conference_Titel :
CAD Systems in Microelectronics, 2003. CADSM 2003. Proceedings of the 7th International Conference. The Experience of Designing and Application of
Print_ISBN :
966-553-278-2
DOI :
10.1109/CADSM.2003.1255091
