Title :
Filter optimization for X-ray inspection of surface-mounted ICs
Author :
Blish, Richard C. ; Li, II Susan X ; Lehtonen, D.
Author_Institution :
Adv. Micro Devices Inc., Sunnyvale, CA, USA
Abstract :
A thin Zn filter (∼20 μm) and relatively low X-ray tube voltage (∼45 kV) is recommended for X-ray inspection of surface-mounted device solder joints on printed wiring boards (PWB). An optimal filter minimizes the Si dose that could result in cumulative damage to sensitive IC circuit nodes, yet provides good contrast for metals such as Cu traces on PWB and device solder balls. While we expect orders of magnitude Si dose reductions when effective filters are inserted, a properly chosen filter should not attenuate the portion of the white X-ray spectrum required to image Cu, Sn and Pb (solder balls). Some X-ray inspection suppliers can achieve a Si dose of as little as 0.060 rads; while other X-ray inspection suppliers, not yet optimized for minimum dose, may use as much as four orders of magnitude more dose. We used thermoluminescent detectors (TLDs) to measure the X-ray dose that IC product shipments would encounter during a shipping process (personal baggage or cargo) as minimal (≤0.050 rads).
Keywords :
X-ray absorption; X-ray analysis; X-ray effects; X-ray optics; filters; inspection; integrated circuit interconnections; integrated circuit packaging; soldering; surface mount technology; thermoluminescent dosimeters; 0.05 rad; 0.06 rad; 20 micron; 45 kV; Cu; Cu PWB traces; Cu-Sn-Pb solder ball material imaging; IC product shipments; PWB; Si; Si dose minimization; Si dose reductions; SnPbCu; X-ray inspection; X-ray tube voltage; Zn; cumulative damage; device solder balls; filter optimization; metal contrast; printed wiring boards; sensitive IC circuit nodes; shipping process X-ray dose; surface-mounted IC; surface-mounted device solder joints; thermoluminescent detectors; thin Zn filter; white X-ray spectrum; Circuits; Filters; Inspection; Low voltage; Soldering; Tin; Wiring; X-ray detection; X-ray imaging; Zinc;
Conference_Titel :
Reliability Physics Symposium Proceedings, 2002. 40th Annual
Print_ISBN :
0-7803-7352-9
DOI :
10.1109/RELPHY.2002.996666