Title :
Trace moisture detection in corrosive gases using quadrupole mass spectroscopy
Author :
Funke, H. ; Raynor, M. ; Houlding, V. ; Ramus, T. ; Hein, S. ; Kirk, R.
Author_Institution :
Adv. Technol. Center, Matheson, Tri-Gas, USA
Abstract :
An online analyzer for impurities in corrosive gases was developed using an HP-5973 MSD quadrupole mass selective detector equipped with customized data acquisition and gas sample inlet. The instrument was evaluated for its ability to quantitatively analyze moisture and other impurities at the ppm level in HCl.
Keywords :
mass spectroscopic chemical analysis; mass spectroscopy; moisture measurement; corrosive gases; impurities; online analyzer; quadrupole mass selective detector; quadrupole mass spectroscopy; quantitative analysis; trace moisture detection; Gases; Human computer interaction; Impurities; Instruments; Iron; Mass spectroscopy; Moisture; Orifices; Page description languages; Valves;
Conference_Titel :
Electronic-Enhanced Optics, Optical Sensing in Semiconductor Manufacturing, Electro-Optics in Space, Broadband Optical Networks, 2000. Digest of the LEOS Summer Topical Meetings
Conference_Location :
Aventura, FL, USA
Print_ISBN :
0-7803-6252-7
DOI :
10.1109/LEOSST.2000.869711
