Title :
Optical sensing opportunities in production MBE
Author :
Evans, K.R. ; Roth, S.P.
Author_Institution :
IQE Inc., Bethlehem, PA, USA
Abstract :
Optical sensing has the potential to enable significant cost reduction and/or quality enhancement via: (1) the ability to impact wafer yield (number of wafers meeting customers spec divided by the total number of wafers grown), and (2) wafer throughput (rate of producing wafers that meet customer spec). Improvements in yield and throughput generally positively impact delivery times as well. Key technological and capacity issues that directly impact MBE process yield and throughput and for which optical sensors could play a role are discussed.
Keywords :
Integrated circuit economics; Integrated circuit yield; Molecular beam epitaxial growth; Optical sensors; Process monitoring; Semiconductor growth; cost reduction; delivery times; next generation systems; optical sensing; platen position sensing; process yield; production MBE; quality enhancement; return on investment; wafer throughput; wafer yield; Costs; Inductors; Optical sensors; Production; Research and development; Semiconductor device manufacture; Semiconductor devices; Solids; Substrates; Throughput;
Conference_Titel :
Electronic-Enhanced Optics, Optical Sensing in Semiconductor Manufacturing, Electro-Optics in Space, Broadband Optical Networks, 2000. Digest of the LEOS Summer Topical Meetings
Conference_Location :
Aventura, FL, USA
Print_ISBN :
0-7803-6252-7
DOI :
10.1109/LEOSST.2000.869718
