Turnkey industrial instrumentation for fast-response, on-line analysis of ppb impurities in the electronic semiconductor gases

Author

Mever, R.T. ; Perez, J.E. ; Strickland, S.

Author_Institution

CIC Photonic Inc., Albuquerque, NM, USA

fYear

2000

fDate

24-28 July 2000

Abstract

A totally integrated hardware and software gas analysis system, IRGAS/sup TM/, is newly available to the semiconductor process engineer to monitor the ppb quality level of the corrosive and toxic cleaning and etching gases in real-time and on-line with process tools in a fab plant. The IRGAS/sup TM/ system is based upon an industrial-ruggedized FTIR spectrometer coupled with a nickel-plated stainless-steel long-path-gas-cell containing stainless-steel mirrors coated with a heavy-layer of reflective-gold over a thick-nickel substrate for chemical corrosion resistance. An electronically-operated gas handling manifold, pumping system, and computer display package are provided within a purgeable stainless-steel enclosure for user safety protection.

Keywords

Fourier transform spectrometers; Impurities; Infrared spectrometers; Process monitoring; Semiconductor device manufacture; Semiconductor technology; Spectrochemical analysis; Spectroscopy computing; Sputter etching; Surface cleaning; FTIR spectrometer; IRGAS system; SPGAS software; computer display package; corrosive gases; electronically-operated gas handling manifold; etching gases; fast-response on-line analysis; integrated hardware-software gas analysis system; least squares analysis; long-path-gas-cell; ppb impurities; process tools; pumping system; purgeable stainless-steel enclosure; quality level; real-time on-line monitoring; semiconductor process gases; toxic cleaning gases; turnkey industrial instrumentation; user safety protection; wafer fab plant; Chemical industry; Cleaning; Etching; Gases; Hardware; Instruments; Monitoring; Software quality; Software systems; Software tools;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronic-Enhanced Optics, Optical Sensing in Semiconductor Manufacturing, Electro-Optics in Space, Broadband Optical Networks, 2000. Digest of the LEOS Summer Topical Meetings

Conference_Location

Aventura, FL, USA

ISSN

1099-4742

Print_ISBN

0-7803-6252-7

Type

conf

DOI

10.1109/LEOSST.2000.869720

Filename

869720