Title :
A complete study of SILC effects on E2PROM reliability
Author :
Larcher, Luca ; Bertulu, Salvatore ; Pavan, Paolo
Author_Institution :
Modena Univ., Italy
Abstract :
In this paper, we investigate SILC effects on E2PROM reliability: the influence of Program/Erase bias and cycle number, of oxide thickness scaling and quality, and of storage field on retention properties of E2PROM memory cell. To accomplish this task, we use a recently proposed compact E2PROM model, extended to include SILC, thus bridging the gap between oxide quality characterization activity performed on MOS test structures, and its actual impact on E2PROM memories.
Keywords :
EPROM; integrated circuit reliability; leakage currents; E2PROM memory cell; MOS structure; SILC; reliability; Bars; Degradation; Leakage current; Nonvolatile memory; PROM; Physics; Random access memory; Temperature; Threshold voltage; Virtual manufacturing;
Conference_Titel :
Reliability Physics Symposium Proceedings, 2002. 40th Annual
Print_ISBN :
0-7803-7352-9
DOI :
10.1109/RELPHY.2002.996684