DocumentCode
2427770
Title
Study of Ion Implanted Silicon Surface Using Acoustoelectric Voltage
Author
Motamedi, M.E. ; Das, P. ; Bharat, R.
fYear
1976
fDate
1976
Firstpage
205
Lastpage
209
Keywords
Attenuation; Current measurement; Delay lines; Density measurement; Silicon; Substrates; Surface acoustic wave devices; Surface acoustic waves; Surface treatment; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
1976 Ultrasonics Symposium
Type
conf
DOI
10.1109/ULTSYM.1976.196666
Filename
1533606
Link To Document