• DocumentCode
    2428113
  • Title

    Processing and characteristics of piezoelectric microcantilevers without substrate

  • Author

    Cao, Ziping ; Zhang, Jinya ; Kuwano, Hiroki

  • Author_Institution
    Dept. of Nanomech., Tohoku Univ., Sendai, Japan
  • fYear
    2010
  • fDate
    20-23 Jan. 2010
  • Firstpage
    716
  • Lastpage
    719
  • Abstract
    Based on a 4 μm thick PZT films with (100) orientation, piezoelectric microcantilevers without a substrate support (free-stand) were fabricated with a typical micromachining process. These microcantilevers have low natural frequency which is suitable for the application on vibration energy harvesting. Simultaneously, their large linear displacement induced by voltage indicates they are also good microactuators, and the calculated piezoelectric coefficient d31 is one of third of that of bulky PZT ceramics.
  • Keywords
    cantilevers; lead compounds; microactuators; oxygen compounds; piezoelectric devices; zirconium compounds; PZT; bulky ceramics; linear displacement; low natural frequency; microactuators; piezoelectric microcantilevers; size 4 mum; typical micromachining process; vibration energy harvesting; lead zirconate titanate (PZT); microcantilevers; micromaching; thick films;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on
  • Conference_Location
    Xiamen
  • Print_ISBN
    978-1-4244-6543-9
  • Type

    conf

  • DOI
    10.1109/NEMS.2010.5592254
  • Filename
    5592254
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2428113