Title :
Design of a three-axis high-g piezoresistive accelerometer
Author :
Lin, Liwei ; Pan, Feng ; Xu, Jiashan ; Guo, Hang
Author_Institution :
Pen-Tung Sah Micro-Nano Technol. Res. Center, Xiamen Univ., Xiamen, China
Abstract :
This paper presents design of a high-g 8-beam piezoresistive micro-accelerometer. Based on mechanics of materials and vibration theory, an analytical model of symmetric beam-mass structure is established to obtain the structural parameters of the micro-accelerometer. Then, finite element method in ANSYS is used to make a 3-dimensional analysis, and results obtained are in good agreement with those from the analytical model. In the end, piezo-resistors of the micro-accelerometer are laid out and sensitivity is discussed.
Keywords :
accelerometers; beams (structures); microsensors; piezoresistive devices; vibrations; high-g accelerometer; material mechanics; piezoresistive micro-accelerometer; symmetric beam-mass structure; three axis accelerometer; vibration theory;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on
Conference_Location :
Xiamen
Print_ISBN :
978-1-4244-6543-9
DOI :
10.1109/NEMS.2010.5592270
