Title :
A micromachined piezoelectric PZT-based cantilever in d33 mode
Author :
Che, Lingjuan ; Halvorsen, Einar ; Chen, Xuyuan ; Yan, Xin
Author_Institution :
Fac. of Sci. & Eng., Vestfold Univ. Coll., Horten, Norway
Abstract :
This paper presents the design and analysis of a piezoelectric lead zirconate titanate (PZT) thin film microcantilever operating in d33 mode. The modal and harmonic response analysis of the PZT/ZrO2/SiO2/Si cantilever beam structure was implemented using the ANSYS software. The simulation results showed the dimensions of the cantilever and the interdigital electrode in terms of resonance frequency and generated output, respectively. The resonance frequencies of the structure were in the range of 3-18.6 kHz through the beam length from 2000 μm to 200 μm. The fabrication process of the cantilever was presented in detail with attention to the sol-gel process of both PZT and ZrO2 films. The PZT thin films exhibit good ferroelectric properties with a remnant polarization of 20 μC/cm2.
Keywords :
beams (structures); cantilevers; micromechanical devices; piezoelectric thin films; ANSYS software; PZT; Si; SiO2; ZrO2; d33 mode; fabrication process; ferroelectric properties; frequency 3 kHz to 18.6 kHz; harmonic response analysis; interdigital electrode; micromachined piezoelectric PZT based cantilever; piezoelectric lead zirconate titanate thin film microcantilever; size 2000 micron to 200 micron; sol-gel process; PZT; cantilever; modeling; sol-gel;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on
Conference_Location :
Xiamen
Print_ISBN :
978-1-4244-6543-9
DOI :
10.1109/NEMS.2010.5592273
